Design optimisation of silicon-based MEMS sensors dedicated to bioaerosols monitoring

摘要

Due to recent paradigm changes for the monitoring of air pollution, assessing human exposure to (bio)- aerosols with low-cost sensors is expected to be of growing importance. In this context, our work subsequently investigates the development of Si-based gravimetric instruments. Thus particle-resonator interactions are considered to provide a particle detachment criteria as well as geometrical features ensuring performances both in terms of sensitivity and uniform resonator response. Analytical and numerical methods have been carried out and confronted to experimental results.