Rapid thermal annealing (RTA) techniques have been widely used in materials engineering. Recently, use of RTA has also considered as an efficient way to control the crystal structure and microstructure of the magnetic materials. L1 FePt and FePd have been drawn much attention due their remarkable magnetocrystalline anisotropy (> 10 erg/cm) [1]. Generally, as-prepared FePt and FePd thin films at ambient temperature are chemically disordered and soft magnetic properties. RTA has been used to improve ordering transformation and control crystal orientation as well as surface morphology of the L1 FePt films. However, there are few reports focusing on the L1-FePd films annealed by RTA. In this work, we aim to investigate the difference in crystal structure and magnetic properties between FePt and FePd thin films using RTA. The preferred orientation, L1 ordering and initial stress of the FePd and FePt films were compared and discussed.
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