Hemispherical-grain polycrystalline silicon films: The dependence of geometric characteristics of grains on formation conditions

摘要

The dependences of the main statistical characteristics of the surface (correlation functions, surface-height distribution functions, correlation length, width of interface), average height and lateral size of grains on the formation conditions have been determined by atomic force microscopy for hemispherical-grain polycrystalline silicon Films (HSG-Si). Dependence of grains shape on the deposition temperature and film thickness is found.