A digital prototype of adaptive control MEMS gyroscope

摘要

The MEMS gyroscope consists of the basic mechanical structure an electronic transducer to excite the system as well as an electronic sensor to detect the change in the mechanical structures modal shape. This paper presents an integration of the design of gyroscope and the signal conditioning unit. The gyroscope is designed and simulated in Intellisuite. The signal conditioning unit includes Phase Locked Loop, PID controller and adaptive filtering. The signal conditioning unit is designed and simulated using MATLAB Simulink. The dynamics of MEMS Gyroscope is done and is compared with the simulated results. The drive frequency and the sense frequency of MEMS gyroscope are accurately measured. This integration improves the performance of MEMS gyroscopes.