Study of abnormal appearances on the failed die by FIB milling technology

摘要

Different abnormal appearances would usually be observed on dies of failed devices after decapsulation. In this paper, cases of failure analysis on typical abnormal appearances were introduced, such as discoloration region observed by metallographic microscope, fused/arching lines, common burnout of metallization on surface and uncovered by Photon Emission Microscope (EMMI) result, etc. It showed a simple and distinct way to study on the causation of abnormal appearances based on Focused Ion Beam (FIB) milling technology. Meanwhile the advantage of strong applicability was presented also.