H2S sensing properties of RGTO grown SnO2 films

摘要

Gas sensing characteristics of tin oxide thin films prepared using rheotaxial growth and thermal oxidation (RGTO) have been investigated as a function of temperature and concentration. These films are found to show maximum response towards H2S at a temperature of 250°C. Sensor response is observed to follow a power law S = A[C]^0.7 in concentration range of 1–100 ppm. The response of these films was also tested for other toxic gases and these films were found to show selectivity towards H2S.