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MEMS-based piezoelectric micropump for precise liquid handling

机译:基于MEMS的压电微型泵,可实现精确的液体处理

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摘要

A micropump is described which uses a piezoelectric actuator to deliver liquid from pump pulsations at volumetric flow rates approaching nl min−1 even at high loading levels (high output pressures). This micropump uses a bimorph which bends when a voltage is applied to the piezo-actuator. By inserting valves into the device, the pump can operate continuously with volumetric pumping rate determined by the frequency of the driving voltage to the pump chamber.
机译:描述了一种微型泵,即使在高负载水平(高输出压力)下,该微型泵也使用压电致动器以接近nl min -1 的体积流量从泵的脉动中输送液体。该微型泵使用双压电晶片,当向压电执行器施加电压时,双压电晶片会弯曲。通过将阀门插入设备中,泵可以连续的连续运转,其体积抽速由泵室驱动电压的频率决定。

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