LIQUID DROPLET EJECTING HEAD, INK CARTRIDGE, IMAGE FORMING APPARATUS, PIEZOELECTRIC ACTUATOR, MICROPUMP, AND LIGHT MODULATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a liquid droplet ejecting head which has a large amount of variation and can be made compact.;SOLUTION: The liquid droplet ejecting head includes: a nozzle plate with nozzle holes for ejecting liquid droplets; partition walls which form ejection chambers corresponding to the nozzle holes; a deformable diaphragm which constitutes walls of the ejection chambers; a lower electrode formed on a surface opposite to a surface of the diaphragm where the ejection chambers are formed; a piezoelectric layer formed on the lower electrode; and an upper electrode formed on the piezoelectric layer. A membrane stress as combined membrane stresses generated by the diaphragm, lower electrode, piezoelectric layer, and upper electrode is a compressive stress in the liquid droplet ejecting head.;COPYRIGHT: (C)2010,JPO&INPIT