Design and fabrication of a microwave kinetic inductance detector for an imaging fourier transform terahertz spectrometer

摘要

We propose a novel microwave kinetic inductance detector named spiral-MKID typified by a rewind spiral strip structure suitable for terahertz applications. The superconducting rewind strip works as a high-Q microwave resonator as well as a broadband terahertz antenna. The spiral-MKIDs fabricated with NbN films reveal loaded quality factors of the order of 10⁴ at ∼3 K.