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Reliability of hybrid III-V on Si distributed feedback lasers

机译:混合III-V在Si分布式反馈激光器上的可靠性

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The hybrid silicon (Si) device platform based on a low-temperature O2 plasma-assisted wafer bonding technique [1] has recently stood out as one of the most promising solutions for Si photonic integrated circuits [2]. Demonstrated key components, e.g., lasers, amplifiers, modulators, photodetectors, have shown excellent performance [2], while high-quality epitaxial transfer up to 150 mm in diameter also paves the way toward large scale manufacturing [3]. One remaining question is whether those hybrid devices are able to show similar reliability as conventional pure III-V counterparts. In this work we report for the first time a reliability study on fabricated hybrid Si distributed feedback (DFB) laser with a quarter-wave shifted cavity design. We investigate the influence on reliability of a superlattice between the lasing region and the bonded interface.
机译:基于低温O2等离子体辅助晶片键合技术的混合硅(Si)器件平台[1]最近成为硅光子集成电路最有希望的解决方案之一[2]。所展示的关键组件,例如激光器,放大器,调制器,光电检测器,表现出出色的性能[2],而直径高达150 mm的高质量外延转移也为大规模制造铺平了道路[3]。剩下的一个问题是,这些混合动力设备是否能够显示出与常规纯III-V同类产品相似的可靠性。在这项工作中,我们首次报告了具有四分之一波移腔设计的混合Si分布式反馈(DFB)激光器的可靠性研究。我们调查激光区域和键合界面之间的超晶格的可靠性的影响。

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