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Oxidation on copper lead frame surface which leads to package delamination

机译:铜引线框架表面的氧化会导致封装分层

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Based on several studies, package delamination caused by copper oxide is one of the most common IC packaging defects detected in backend assembly processes. The possible root causes for the copper oxide formation could be due to leadframe surface oxidation, incompatible process temperature and ineffectiveness of surface cleaning prior to molding. In order to effectively investigate the contribution of copper oxide formation to package delamination, this study have been initiated with the application of relevant reliability stress tests and surface interface analytical techniques. Reliability stress test of HTS was carried out to accelerate the copper oxide formation after molding and the delamination occurrence being monitored by SAM scanning after defined stress test intervals. To further on the study, a detailed elemental low KeV EDX analysis was performed to assess the delaminated interfaces after mechanical decapsulation of the failure units. In addition, AES analysis including depth profiling was also applied to determine the copper oxide layer. A good correlation of copper oxide formation to package delamination was demonstrated and inappropriate temperature used in wirebonding clamping was identified to be the most probable root cause of the package delamination.
机译:根据多项研究,由铜氧化物引起的封装分层是后端组装工艺中最常见的IC封装缺陷之一。形成氧化铜的根本原因可能是由于引线框表面的氧化,不兼容的工艺温度以及成型前表面清洁的无效性。为了有效研究氧化铜形成对包装脱层的影响,已通过相关可靠性应力测试和表面界面分析技术的应用启动了这项研究。进行了HTS的可靠性应力测试,以加快成型后氧化铜的形成,并在定义的应力测试间隔后通过SAM扫描监控分层的发生。为了进一步进行研究,对故障单元进行机械解封装后,进行了详细的元素低KeV EDX分析,以评估分层界面。此外,还应用了包括深度分析在内的AES分析来确定氧化铜层。结果表明,氧化铜的形成与封装的脱层有良好的相关性,引线接合夹紧中使用的不适当温度被认为是封装脱层的最可能根源。

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