Success in MEMS, “from DRIE technology to social innovation”

摘要

Many MEMS devices like air-bag sensors and ink jet heads now well-established and are being manufactured in high volumes. DRIE is a key enabling process for manufacturing most silicon-based MEMS. Over the past 15 years DRIE process capability has been continuously improved and developed, to meet the needs of MEMS manufacturers. MEMS devices are now finding new, emerging applications which promise to improve our lives in many other ways such as environmental monitoring and control, energy conservation and harvesting, life sciences and security.