Development of mathematical model of spring suspension system for microelectromechanical angular Velocity Sensor (MEMS gyroscope)

摘要

In the paper a mathematical model for calculating constructive parameters (thickness and length) of the spring element of the spring suspension system for the micromechanical gyroscope (microelectromechanical angular velocity sensor) is developed. The interdependence between the spring suspension system and technical characteristics of the sensor is analyzed.