Crystal Growth Rates in Doped Sb_xTe Fast-Growth Phase-Change Films Studied with Transmission Electron Microscopy

摘要

Isothermal crystallization of doped SbxTe fast-growth phase-change films was investigated using transmission electron microscopy with in situ heating. Sb_xTe films with four different values for the Sb/Te ratio, x=3.0, 3.3, 3.6 and 4.2, were analyzed and the films were sandwiched between two types of dielectric layers. One dielectric layer type is based on 80at.%ZnS-20at.%SiO_2, the other on (Ge,Cr)N. The crystal growth rates reduce if the phase-change films are sandwiched between amorphous dielectric layers. The reduction is very pronounced at the lowest measured temperatures (150 ℃), becomes smaller at higher temperatures and probably disappears at around 200 ℃. The crystal growth rates increase with increasing Sb/Te ratio, but the activation energy for crystal growth is not significantly affected by the Sb/Te ratio. Finally a systematic study of the effect of the electron beam of the TEM on the crystal growth rates is performed showing accelerated growth rates. The present work shows that particularly at relative low temperatures, just above the glass-transition temperature, the growth rates as limited by the atomic mobilities are sensitive to various (boundary) conditions, e.g. capping layers and irradiation.