Research on Nano-imprint Microfabrication and Bonding of Polymer Microfluidic Chips

摘要

Microfluidic chips based on MEMS technology have played significant roles in biomedicine, analytical chemistry and related fields. Polymer materials for microfluidic chips were proven to owe many advantages such as good insulation and optical properties, low price, easy production process, and so on. This paper documents the process of fabricating a silicon mold and the parameters on production of micro-channels by nano-imprinting technology. Study is reported on the bonding of microfluidic chips, including direct thermal bonding and vacuum thermal bonding. The nano-imprint processes are simulated by field limited method, and the corresponding optimization parameters of nano-imprint and bonding are also presented, providing a basis for the mass production of polymer microfluidic chips.