Research on Electromagnetic Characters of Electron-cyclotron-resonance Plasma

摘要

A theoretical model of microwave ECR(electron-cyclotron-resonance) discharge chamber is developed to explain the electron temperature and plasma density of the ECR plasma. The plasma in the discharge chamber has been produced by the electron cyclotron resonance of a microwave input, immersed in a static magnetic field produced by permanent-magnet. After verified the theoretical predictions with experimental measurements, the functional relationship of electron temperature and plasma density inner ECR chamber are derived so that a simple scaling law of the electron temperature and density in terms of system parameters are given.