Mechanical Property Measurement of Thin-Film Gold using Thermally Actuated Bimetallic Cantilever Beams

摘要

We describe a method for estimating the Young's modulus of thin-film gold deposited on the poly2 layer in the MUMPs process is described. An optical detection system employing position sensitive detectors (PSD) is built to measure the bimetallic (gold/poly2) cantilever deflection with increasing temperature. Measured cantilever deflections are compared to finite element simulations performed with MEMCAD~(TM) which show an excellent match for a Young's modulus of 78GPa and a Poisson's ratio of 0.35.