MEMS-based Thermal Flow Sensor System for High Ambient Temperatures

摘要

We present a MEMS (micro electro mechanical system) based thermo-electric flow measurement system operating at high ambient temperatures. Therefore, we developed a packaging based on high temperature stable materials, operating at ambient temperatures up to T=250deg C. The system is characterized at different ambient temperatures by considering the sensor system as both, a mass flow meter and a volume flow meter. In case of a mass flow meter, the characteristic curves differ only little, although the ambient temperatures change. The system shows good stability at T=200deg C during a first long-time test of 200 hours.