Formation and optical properties of amorphous carbon film having embedded nanoparticles deposited by anodic jet carbon arc technique

摘要

This paper reports the formation and optical properties of amorphous carbon film having embedded nanoparticles deposited by anodic jet carbon arc technique (AJCA). The films deposited have been characterized by x-ray diffraction (XRD), high resolution transmission electron microscope (HRTEM), and scanning electron microscope (SEM) and spectroscopy ellipsometry (SE) measurements. XRD pattern exhibits dominantly an amorphous nature of film. HRTEM investigation shows initially the amorphous structure. However, on closer examination nanoparticles were found to be embedded in the amorphous matrix. The effect of substrate bias and the magnetic field on the optical constants evaluated from SE have been studied. On comparison of deposition condition with and without magnetic field used in growing a-C films there is a change in the values of optical constants.