Arnoldi Algorithm Based Krylov Subspace Technique for MEMS Model Order Reduction

摘要

Rapid modeling and simulation of the overall behavior of MEMS devices by computer-aided design tools are required on account of high integration and system functional diversification of MEMS components, especially current complex system are integrated with both functional structure of MEMS devices and circuits for mixed-signal processing unit, such as system on chip (SOC) and system in package (SIP) representatively. System-level simulation methods based on macromodel which can get behavior characteristic of MEMS have become a famous research field specific to the across multiple coupled energy domains.