Design fabrication and control of 4-DOF high-precision stage

摘要

Motion control techniques are employed on nanoscale positioning in precision mechanical equipment, for example, NC machine tools, exposure systems, and so on. In our past paper, we designed and fabricated an experimental 1-DOF precision stage. Then, we achieved a high-speed nanoscale positioning and a master-slave synchronous position control with another 1-DOF stage. However, the stages in actual industrial equipment often have several degrees of freedom. The degrees of freedom have to be controlled simultaneously. In this paper, a new experimental 4-DOF high-precision stage is designed and fabricated. The 4-DOF stage can move to not only one translation but also the height, the pitching, and the rolling directions. Then, a control system for the 4-DOF stage is proposed. Finally, experiments are performed to show the advantages of the proposed method.