Interferometric Measuring Systems of Nanopositioning and Nanomeasuring Machines

摘要

The Nanopositioning and Nanomeasuring Machine (NMM-1) developed at the llmenau University of Technology is equipped with three homodyne plane-mirror miniature interferometers for the measurement of the displacement of a movable corner mirror. The object being measured is placed on the corner mirror, which is positioned by a three-axis drive system. The probing system and the plane-mirror miniature interferometers are fixed on a metrology frame made of Zerodur®. Depending on the selected probing system, the machine is capable of carrying out both 21/2D surface scans and 3D coordinate measurements [1, 2, 3]. In this way objects can be measured or scanned in volumes up to 25 mm × 25 mm × 5 mm with nanometre precision using various optical and tactile probe systems.