Comparison of a Scanning Interferometric Profile Measurement Method and an Ultra-Precise Coordinate Measuring Machine

摘要

Comparative profile measurements of a test specimen with a diameter of 150 mm and a peak-to-valley height of 50 urn carried out by an ultra-precise coordinate measuring machine (Panasonic UA3P) and a highly accurate scanning interferometric multi-sensor instrument (ETMS) are presented. The instruments and their principles are described. Although the measurement principles of the instruments are different, the measurements agree within the claimed uncertainties. The rms-difference of the measurement results is less than 20 nm.