INTRODUCTION TO EPMA AND SEM

摘要

In this presentation an introduction is given into the operation of the scanning electron microscope (SEM) and the electron probe microanalyzer (EPMA). The overview will first discuss the various electron sources available, and the achievable resolutions and spot sizes will be compared for different sources. Next the interaction of the electrons with the specimen will be discussed and the different signals created in the interaction process. Finally this presentation will bring up the various analytical techniques and capabilities that an SEM and EPMA can provide, such as secondary (SE) and backscatter (BSE) electron imaging, electron backscatter pattern analysis (EBSD), cathodoluminescence analysis (CL), and so on. This presentation will be at a very basic introductory level.