首页> 中文会议>2018 年第十四届中国太阳级硅及光伏发电研讨会 >单晶硅片制绒不均匀性对PECVD的影响

单晶硅片制绒不均匀性对PECVD的影响

摘要

The reflectivity reaches the lowest point at a right texturization time.Both large and small pyramid sizes lead to similar reflectivities.Nonuniform flow leads to nonuniform distribution of pyramid size.Wafer with SDR absorbs greater amount of additive than rough wafer.Enhancing the basicity of solution increases cleaning efficiency.The residue of additive on the textured wafer increases while applying SDR. A possible explanation could be that the wafer with arough surface reacts violently with KOH, releasing a large amount of H2, which hindering the absorption of additive to the wafer surface.

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