FOLDABLE DIGITAL MICROFLUIDIC (DMF) DEVICE USING FLEXIBLE ELECTRONIC PLATFORM AND METHODS OF MAKING SAME

摘要

A foldable digital microfluidic (DMF) device using a flexible electronic platform and methods of making same is disclosed. The foldable DMF device includes a flexible polyimide substrate with thin copper features that is foldable to provide opposing substrates. The foldable DMF device further includes a flexible polyimide dielectric layer also with thin copper features. In some embodiments, the structure for forming the presently disclosed foldable DMF device is based on the use of blind vias. In some embodiments, the foldable DMF device includes one droplet actuation layer. In other embodiments, the foldable DMF device includes multiple droplet actuation layers. Additionally, a method of making the foldable DMF device is provided.