COMPUTER-IMPLEMENTED METHOD FOR DEFECT ANALYSIS, APPARATUS FOR DEFECT ANALYSIS, COMPUTER-PROGRAM PRODUCT, AND INTELLIGENT DEFECT ANALYSIS SYSTEM

摘要

A computer-implemented method for defect analysis is provided. The computer-implemented method includes obtaining a plurality of sets of defect point coordinates, a respective set of the plurality of sets of defect point coordinates including coordinates of defect points in a respective substrate of a plurality of substrates, the coordinates of defect points in the respective substrate being coordinates in an image coordinate system; combining the plurality of sets of defect point coordinates according to the image coordinate system into a composite set of coordinates to generate a composite image; and performing a clustering analysis to classify defect points in the composite set in the composite image into a plurality of clusters.