Method for measuring optical constant of thin film of fluorine-containing organosilicon compound

摘要

The optical constant (refractive index n, extinction coefficient κ) of a thin film of a fluorine-containing organosilicon compound having a small surface roughness or haze value and having a homogeneous surface can be directly measured with high precision and with good reproducibility by the ellipsometry method. provision of methods. As the surface roughness, a thin film of a fluorine-containing organosilicon compound having an arithmetic mean roughness of less than 1.0 nm, a root mean square roughness of less than 2.0 nm, a haze value of less than 0.3, and a film thickness of 3 to 10 nm is disposed on a substrate A method for measuring the optical constant of a thin film of a fluorine-containing organosilicon compound, comprising the steps of: forming; and measuring, by ellipsometry, the optical constant of the thin film formed on the substrate.