Quality evaluation method and quality control method for thin films of hydrolyzable fluorine-containing organosilicon compounds

摘要

PROBLEM TO BE SOLVED: To provide a quality index of a thin film (antifouling coating thin film) of a fluorine-containing organosilicon compound having water-repellent and oil-repellent properties, optical properties and durability, particularly a hydrolyzable fluoroorganic silicon compound. Providing a method for efficiently evaluating and controlling the quality of thin films. SOLUTION: The hydrolyzable inclusion includes a step of measuring the thickness of a thin film of a hydrolyzable fluoroorganic silicon compound formed on a substrate and determining whether or not the film thickness is 6 nm to 11 nm. A method for evaluating the quality of a thin film of a fluoroorganosilicon compound. [Selection diagram] None