MN-DOPED PZT-BASED PIEZOELECTRIC FILM FORMATION COMPOSITION AND MN-DOPED PZT-BASED PIEZOELECTRIC FILM

摘要

A composition used for forming a PZT-based piezoelectric film made of a Mn-doped composite metal oxide includes a PZT-based precursor including each metal atom constituting the composite metal oxide, a diol, and polyvinylpyrrolidone, When the metal atomic ratio in the composition is expressed as Pb:Mn:Zr:Ti, Pb satisfies 1.00 to 1.20, Mn satisfies 0.002 or more and less than 0.05, Zr satisfies 0.40 to 0.55, and Ti satisfies 0.45 to 0.60 is satisfied, and the PZT-based precursor is included in a ratio such that the total ratio of the metal atomic ratios of Zr to Ti is 1.