Method for characterizing the dynamic transmission behavior of a system, in particular for microlithography

摘要

The invention relates to a method for characterizing the dynamic transmission behavior of a system, in particular for microlithography, wherein the method comprises the following steps: determining an amplitude response as frequency dependence of the amplitude of a transmission function of the system, determining for this amplitude response, the third derivation of amplitude after frequency, and characterizing the dynamic transmission behavior of the system by determining at least one natural frequency (ƒ0) and at least one attenuation (D) based on this third derivation.