首页> 外国专利> Magnetic property measuring systems, methods of measuring magnetic property, and methods of fabricating magnetic memory devices using the same

Magnetic property measuring systems, methods of measuring magnetic property, and methods of fabricating magnetic memory devices using the same

机译:磁性测量系统,测量磁性的方法,以及使用该磁性物质的制造方法

摘要

A magnetic property measuring system may include a stage configured to load a sample and to rotate the sample about a rotation axis such that the stage rotates the sample by a rotation angle, the rotation axis extending normal to a top surface of the sample. The magnetic property measuring system may further include a polarizer having a first polarization axis, and an analyzer having a second polarization axis. The polarizer and the analyzer may enable the first and second polarization axes to be independently rotated based on the rotation angle of the sample.
机译:磁性测量系统可包括配置成装配样品并围绕旋转轴线旋转样品的阶段,使得该平台通过旋转角度旋转样品,旋转轴线垂直于样品的顶表面延伸。 磁性测量系统还可包括具有第一偏振轴的偏振器,以及具有第二偏振轴的分析仪。 偏振器和分析仪可以使第一和第二偏振轴能够基于样品的旋转角度独立地旋转。

著录项

  • 公开/公告号US11237224B2

    专利类型

  • 公开/公告日2022-02-01

    原文格式PDF

  • 申请/专利权人 SAMSUNG ELECTRONICS CO. LTD.;

    申请/专利号US201916592086

  • 发明设计人 EUNSUN NOH;

    申请日2019-10-03

  • 分类号H01L27/22;G01R33/032;H01L43/02;H01L43/12;H01L21/66;G01R15/24;G01R33/12;

  • 国家 US

  • 入库时间 2022-08-24 23:35:15

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