SYSTEM AND METHOD FOR CLEANING SURFACE OF SUBSTRATE USING ROLL-TO-ROLL PLASMA GENERATING DEVICE

摘要

A roll-to-roll surface cleaning treatment system and method using a plasma generating device are provided, in which the system may includes an upper housing containing a first plasma generating device and a first transfer roller that faces a nozzle from which a plasma beam generated by the first plasma generating device is discharged and that winds and transfers a flexible substrate, the upper housing comprising a gas inlet, an entrance through which the flexible substrate is introduced, and an outlet through which the flexible substrate is discharged, and a lower housing connected to the entrance of the upper housing and containing a second plasma generating device and a second transfer roller that faces a nozzle from which a plasma beam generated by the second plasma generating device is discharged and that winds and transfers the flexible substrate, the lower housing comprising a gas outlet, and an inlet through which the flexible substrate is introduced, in which the upper housing is maintained at a low-temperature atmosphere by introducing a low-temperature refrigerant gas through the gas inlet.