FEMTOSECOND LASER SYSTEM FOR PROCESSING MICRO-HOLE ARRAY

摘要

Provided is a femtosecond laser system for processing a micro-hole array, comprising: a femtosecond laser, a half-wave plate, a polarizer, a concave lens, a convex lens, a diaphragm, a mechanical shutter, a phase-type spatial light modulator, a first plano-convex lens, a reflecting mirror, a second plano-convex lens, a dichroic mirror, a camera, a processing objective lens, a six-axis translation stage and a transmissive white light source.