Traceable In-Situ Micro- and Nano-Indentation Testing Instrument and Method under Variable Temperature Conditions

摘要

The present disclosure relates to a traceable in-situ micro- and nano-indentation testing instrument and method under variable temperature conditions. A macro-micro switchable mechanical loading module, a nano mechanical loading module and an indentation position optical positioning module are fixed on a gantry beam, an optical imaging axis of an optical microscopic in-situ observation or alignment module and a loading axis of the nano mechanical loading module are coplanar, the optical microscopic in-situ observation or alignment module and the function switchable module are mounted on a table top of a marble pedestal, and a contact or ambient mixed variable temperature module is fixedly mounted on the function switchable module. A modular design is adopted, the micro- and nano-indentation testing instrument is used as a core, in combination with a multi-stage vacuum or ambient chamber, an indentation depth traceability calibration module and multiple sets of optical microscopic imaging assemblies.