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SYSTEM AND METHOD FOR PERFORMING PROCESS MODEL CALIBRATION IN A VIRTUAL SEMICONDUCTOR DEVICE FABRICATION ENVIRONMENT
SYSTEM AND METHOD FOR PERFORMING PROCESS MODEL CALIBRATION IN A VIRTUAL SEMICONDUCTOR DEVICE FABRICATION ENVIRONMENT
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机译:用于在虚拟半导体器件制造环境中执行流程模型校准的系统和方法
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摘要
A virtual fabrication environment for semiconductor device fabrication that includes an analytics module for performing key parameter identification, process model calibration and variability analysis is discussed.
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