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Electro-optical unit with III-V reinforcement materials and integrated heat sink

机译:具有III-V钢筋材料的电光单元和集成散热器

摘要

An electro-optical unit (11; 12; 13; 14) comprising: a first wafer component (1) comprising a silicon substrate (100) and a cladding layer (101, 103) on said silicon substrate (100), said cladding layer ( 101, 103) has a cavity (104c) formed therein, the cavity (104c) being filled with a heat spreader (104; 104a, 104b) having a greater thermal conductivity than that of the cladding layer (101, 103), the cavity (104c) in the cladding layer (101, 103) extends up to the silicon substrate (100) such that the heat spreader (104; 104a, 104b) is in contact with the silicon substrate (100);a second wafer component (2nd ) comprising a stack (108) of III-V semiconductor amplification materials designed for optical amplification of a given radiation, the second wafer component (2) being so bonded to the first wafer component (1). that a bottom of the stack (108) of III-V semiconductor - reinforcement materials in thermal communication with the heat spreader (104; 104a, 104b), the stack (108) of III-V semiconductor reinforcement materials being structured to face and at least partially overlap the heat spreader (104; 104a, 104b); and a silicon component (102) embedded in the remaining cladding layer and disposed opposite the stack (108) of III-V semiconductor gain materials; characterized in that an index of refraction of the heat spreader (104; 104a, 104b) is lower than an index of refraction the silicon substrate (100);the refractive index of the heat spreader (104; 104a, 104b) is lower than an average refractive index of the stack (108) of III-V semiconductor gain materials at the given radiation; and the heat spreader (104; 104a, 104b) is an electrically insulating heat spreader.
机译:电光单元(11; 12; 13; 14),包括:第一晶片组分(1),包括硅衬底(100)和所述硅衬底(100)上的包层(101,103),所述包层(101,103)具有形成在其中的腔(104c),腔体(104c)填充有散热器(104,104b),其具有比包层(101,103)更大的导热率(104a,104a,104b),所述包层(101,103)中的腔(104c)延伸到硅衬底(100),使得散热器(104; 104a,104b)与硅衬底(100)接触;第二晶片组件(第二)包括设计用于给定辐射的光学放大的III-V半导体放大材料的堆叠(108),第二晶片部件(2)如此键合到第一晶片部件(1)。 III-V半导体 - 加强材料的堆叠(108)的底部与散热器(104; 104a,104b),III-V半导体加强材料的堆叠(108)构造成面部和处最小部分重叠散热器(104; 104A,104B);和嵌入剩余的包层层中的硅组分(102)并设置III-V半导体增益材料的堆叠(108);其特征在于散热器(104; 104a,104b)的折射率低于硅衬底(100)的折射率;散热器(104; 104a,104b)的折射率低于一个在给定辐射的III-V半导体增益材料的堆叠(108)的平均折射率;和散热器(104; 104a,104b)是电绝缘散热器。

著录项

  • 公开/公告号DE112018000883B4

    专利类型

  • 公开/公告日2022-01-05

    原文格式PDF

  • 申请/专利权人 INTERNATIONAL BUSINESS MACHINES CORPORATION;

    申请/专利号DE20181100883T

  • 发明设计人 CHARLES CAER;HERWIG HAHN;

    申请日2018-05-02

  • 分类号H01S5/024;H01S5/323;H01L33/64;

  • 国家 DE

  • 入库时间 2024-06-14 22:38:49

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