Method and sensor system for assigning a measured pressure value to a raw measured value of a capacitive pressure sensor

摘要

The invention relates to a method for assigning a measured pressure value to a raw measured value of a capacitive pressure sensor, with a sensor capacitance of the pressure sensor having a non-linear dependency on an applied pressure, comprising the steps: Generating a digitized raw measured value for an applied pressure by evaluating the sensor capacitance of the pressure sensor and using an analog-to-digital converter and• determining a measured pressure value from the digitized raw measured value by means of an assignment function, the assignment function being formed by approximating the sensor capacitance using a model based on a parallel connection of at least two plate capacitors, each with a pressure-dependent capacitance, wherein the assignment function has a quotient of a first polynomial and a second polynomial and wherein the first polynomial and the second polynomial are each at least square of the digitized raw measurement value ert depend. The invention further relates to a corresponding sensor system.