METHOD FOR PRODUCING A PHYSICAL VAPOR DEPOSITION (PVD) TARGET FOR CRTAN COATINGS AND CRTA TARGET OBTAINED THEREBY

摘要

A process for producing a hard material layer on a substrate. A multilayer coating system is applied to the substrate by alternate deposition of CrTaN and AlTiN by way of physical vapor deposition (PVD). The CrTaN and/or the AlTiN are preferably deposited from a composite target.