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A method for producing a transparent conductive oxide thin film, an oxide thin film using the method and a electronic device using the film
A method for producing a transparent conductive oxide thin film, an oxide thin film using the method and a electronic device using the film
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机译:一种用于制造透明导电氧化物薄膜的方法,使用该方法的氧化物薄膜和使用薄膜的电子器件
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摘要
The present invention relates to a method for manufacturing a transparent conductive oxide (TCO) having high conductivity through a low-cost process by forming a thin film on a substrate using a simple hydrothermal synthesis method at a low temperature, and the transparent conductive oxide manufactured thereby It relates to a thin film and an electronic device including the same. According to the present invention, by manufacturing a high-conductivity thin film in a relatively simple process using a low-cost precursor solution, it is possible to significantly reduce manufacturing cost and manufacturing time, thereby greatly improving productivity.
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