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Equipment module with enhanced protection from airborne contaminants, and method of operation
Equipment module with enhanced protection from airborne contaminants, and method of operation
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机译:设备模块,具有增强的空气污染物的保护和操作方法
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摘要
An Equipment Front End Module (EFEM) having a Front Opening Unified Pod (FOUP) dock and a tool access port, includes a robotic wafer handling system configured to transfer silicon wafers between a FOUP coupled to the FOUP dock and a process tool positioned for access via the tool access port. An air curtain system inside the EFEM is positioned to produce an air curtain across the tool access port while the port is open, acting to isolate the interior of the EFEM from the tool environment, and prevent passage of airborne contaminants into the EFEM via the access port.
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