3D 3D CAPACITOR AND CAPACITOR ARRAY FABRICATING PHOTOACTIVE SUBSTRATES

摘要

The present invention provides a method for manufacturing a photosensitive glass substrate comprising at least silica, lithium oxide, aluminum oxide and cerium oxide, masking a design layout comprising one or more holes or posts on the glass substrate, for monolithic system level integration. Provided are a manufacturing method by the step of forming at least one high surface area capacitive device, and a device manufactured thereby.