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DLC Thin film depostion apparatus and DLC thin film coating methos using the appartus
DLC Thin film depostion apparatus and DLC thin film coating methos using the appartus
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机译:DLC薄膜沉积设备和使用该装置的DLC薄膜涂层方法
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摘要
The present invention relates to a thin film deposition apparatus and a DLC thin film coating method using the same. It relates to a thin film deposition apparatus capable of coating a DLC thin film having very excellent surface roughness while maintaining low-friction physical properties by making it possible and a DLC thin film coating method using the same.
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