Experimental Study on the Surface Modification of Ultra Thin DLC Films

摘要

Surface modification of Diamond-like carbon (DLC) films was carried out in order to estimate the reliability of the ultra thin DLC films. The wear resistance, conductivity and mechatronic reliability of the films were studied by contact atomic force microscope (AFM), electric force microscope (EFM) and conductive AFM. The failure mechanism of pits formed and the reason for conductivity changed of DLC films were examined.