Linear multi image obtaining method for high-speed inspection of large area substrate using area scan camera

摘要

The present invention relates to a technology for continuously capturing images of different colors on a large-area substrate in line units using an area scan camera, and using them to quickly acquire inspection images of various colors. A linear multi-image acquisition method for high-speed inspection of large-area substrates using an area scan camera according to the present invention projects light sources of different colors from an illuminator to a scan section of a stage, but a plurality of color light sources are different from each other in the scan section A first step of projecting to the divided area, a second step of transferring a large-area substrate located on the upper surface of the stage to the scan section, and a large-area substrate by continuously photographing a large-area substrate transporting the scan section of the stage with an area scan camera A third step of acquiring a plurality of image frames having different colors for each position of the divided region, wherein the image frame consists of a captured image at a time when the large-area substrate moves as much as the divided region of the scan section, and area scanning by the image analysis unit A fourth step of generating different inspection images for each color on one large-area substrate by extracting and synthesizing the same color images for different divided regions from a plurality of image frames acquired from the camera. characterized.