FLEXIBLE CAPACITOR ARRAY AND PREPARATION METHOD THEREFOR, CAPACITOR ARRAY DETECTION SYSTEM, AND ROBOT

摘要

A flexible capacitor array (20), comprising: a first flexible electrode layer (201), a first electrode array (2012) being provided thereon; a second flexible electrode layer (202), a second electrode array (2022) provided opposite the first electrode array being provided thereon; and a spacer layer (204) and a dielectric layer (203), the spacer layer and the dielectric layer being provided between each electrode pair provided opposite each other in the first electrode array and the second electrode array, and each unit capacitor of the flexible capacitor array comprising an electrode pair, the spacer layer and the dielectric layer. Also disclosed are a preparation method for the flexible capacitor array, a capacitor array detection system, and a robot. The flexible capacitor array realizes the flexibility, high sensing density and high sensitivity of a mechanical sensing system by combining the flexible electrode layers and the dielectric layer, and improves the stability of the flexible capacitor array while achieving high sensitivity by means of the spacer layer, so that the flexible capacitor array as a whole exhibits flexibility and greatly improves the sensitivity, stability, and ability to withstand high pressure of a pressure sensing system. The motion balance control of the robot can be performed on the basis of the result of the capacitor array detection system.