QUARTZ HARMONIC OSCILLATOR ULTRA-PRECISION MACHINING METHOD AND DEVICE

摘要

The present invention belongs to the field of machining technology, and in particular relates to an ultra-precision machining method and device for a quartz harmonic oscillator. Firstly, the outer surface of a quartz harmonic oscillator is machined by means of a common molding method and is then subjected to rough grinding, semi-precise grinding and chemical mechanical polishing using a special grinding wheel, and in combination with an advanced online measurement technique, the polished surface is detected, and the point location exceeding the allowance range is polished until the requirements are met; and the machined outer surface is fixed using a special clamp, and the inner surface of the harmonic oscillator is then subjected to forming grinding, chemical mechanical polishing and detection machining. The special clamp and the grinding wheel are hollow umbrella-shaped, the grinding portion of the grinding wheel is consistent with the shape of the machined surface, and a protection device and a polishing liquid recovery device are provided in the machining process to ensure that the machining process is environmentally friendly. In addition, the machining method and device provided in the present invention have advantages such as a high machining efficiency, a good machining coaxiality, and being low in damaged layers on the machined surface.