Fluid heaters, fluid control devices, and methods of making fluid heaters

摘要

A fluid heater capable of increasing the heating efficiency of a fluid, a fluid control device, and a manufacturing method of the fluid heater are provided. The fluid heater 20 includes a flow path member 22 having a flow path 22c formed thereon, and a heater 25 for heating the flow path member 22, and the flow path 22c has a spiral shape and extends in the longitudinal direction. The shape of the cross-section along the line forms a polygonal shape. The forming direction M of the flow path member 22 is parallel to one of the polygonal diagonals. The flow path member 22 has a substantially cylindrical shape, and its longitudinal direction is the same as the molding direction of the flow path member 22 .