Fluid heater, fluid control device, and manufacturing method of fluid heater

摘要

PROBLEM TO BE SOLVED: To provide a fluid heater enabling fluid heating efficiency thereof to be improved, and a fluid control device and a method of manufacturing the fluid heater.SOLUTION: The fluid heater comprises: a flow passage member 22 in which a flow passage 22c is formed; and a heater for heating the flow passage member 22. The flow passage 22c is formed in a spiral shape and has a polygonal longitudinal cross section. The molding direction of the flow passage member 22 forms a parallel to one of diagonal lines of a polygon.The flow passage member 22 is formed in a substantially cylindrical shape and the longitudinal direction of the flow passage member 22 is the same direction as the molding direction of the flow passage member 22.SELECTED DRAWING: Figure 3