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Method for manufacturing a plated sculpture

机译:制造镀雕雕塑的方法

摘要

Step (1) of forming a resin film of a photosensitive resin composition containing a sulfur-containing compound having at least one selected from a mercapto group, a sulfide bond and a polysulfide bond on the substrate of a substrate having a metal film; A step (2) of exposing the resin film, a step (3) of forming a resist pattern film by developing the resin film after exposure, and a step of performing plasma treatment of an oxygen-containing gas on a substrate having the resist pattern film on a metal film (4) and (5) of performing a plating treatment using the resist pattern film as a mold after the plasma treatment;
机译:形成含有含硫化合物的光敏树脂组合物的树脂膜的步骤(1),所述含硫化合物具有选自巯基,硫化物键和具有金属膜的基材的基材上的硫化物键和多硫化物键; 暴露树脂膜的步骤(2),通过在曝光后显影树脂膜形成抗蚀剂图案膜的步骤(3),以及在具有抗蚀剂图案的基板上进行含氧气体的等离子体处理的步骤 在等离子体处理之后使用抗蚀剂图案膜进行电镀处理的金属膜(4)和(5)上的薄膜;

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